RT journal article
T1 The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films
A1 Mary Joy, Rani
A1 Pobedinskas, Paulius
A1 Baule, N
A1 Bai, S
A1 Jannis, D
A1 Gaquelin, N
A1 Pinault-Thaury, Marie-Amandine
A1 Jomard, F
A1 Jothiramalingam Sankaran, Kamatchi
A1 Rouzbahani, Rozita
A1 Lloret Vieira, Fernando Manuel
A1 Desta, Derese
A1 D´haen, J
A1 Verbeeck, J
A1 Becker, MF
A1 Haenen, Ken
A2 Física Aplicada
K1 Linear antenna
K1 CVD reactor
K1 Nanocrystalline diamond
K1 Young’s modulus
K1 Residual stress
AB This study reports the impact of film microstructure and composition on the Young's modulus and residual stress in nanocrystalline diamond (NCD) thin films (≈250nm thick) grown on silicon substrates using a linear antenna microwave plasma-enhanced chemical vapor deposition (CVD) system. Combining laser acoustic wave spectroscopy to determine the elastic properties with simple wafer curvature measurements, a straightforward method to determine the intrinsic stress in NCD films is presented. Two deposition parameters are varied: (1) the substrate temperature from 400 °C to 900 °C, and (2) the [P]/[C] ratio from 0 ppm to 8090 ppm in the H2/CH4/CO2/PH3 diamond CVD plasma. The introduction of PH3 induces a transition in the morphology of the diamond film, shifting from NCD with larger grains to ultra-NCD with a smaller grain size, concurrently resulting in a decrease in Young's modulus. Results show that the highest Young's modulus of (1130±50) GPa for the undoped NCD deposited at 800 °C is comparable to single crystal diamond, indicating that NCD with excellent mechanical properties is achievable with our process for thin diamond films. Based on the film stress results, we propose the origins of tensile intrinsic stress in the diamond films. In NCD, the tensile intrinsic stress is attributed to larger grain size, while in ultra-NCD films the tensile intrinsic stress is due to grain boundaries and impurities.
SN 1359-6454
YR 2024
FD 2024
LK http://hdl.handle.net/10498/30528
UL http://hdl.handle.net/10498/30528
LA eng
DS Repositorio Institucional de la Universidad de Cádiz
RD 13-nov-2026