RT journal article
T1 Three-Dimensional Diamond MPCVD Growth over MESA Structures: A Geometric Model for Growth Sector Configuration
A1 Lloret Vieira, Fernando Manuel
A1 Araújo Gay, Daniel
A1 Eon, David
A1 Bustarret, Etienne
A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A2 Física Aplicada
AB The overgrowth of {100}-oriented patterned diamond substrates by microwave plasma enhanced chemical vapor deposition was studied by transmission electron microscopy through a stratigraphic approach. A sector-like growth behavior is evidenced, resulting from a competition between slowly growing facets at protruding (top) corners and edges against quickly growing facets at recessing (bottom) corners. Depending on the pattern orientation and height, under some particular experimental conditions, it is possible to predict the sequence of growth sectors, and thus to choose the crystallographic orientation of the overgrown surface, by stopping the growth at the right stage. A simple two-dimensional model is provided, allowing the fabrication of structures adapted to the requirements of specific electronic devices.
YR 2018
FD 2018
LK http://hdl.handle.net/10498/30535
UL http://hdl.handle.net/10498/30535
LA eng
DS Repositorio Institucional de la Universidad de Cádiz
RD 13-nov-2026