RT journal article T1 Diamond as substrate for 3C-SiC growth: A TEM study A1 Lloret Vieira, Fernando Manuel A1 Piñero Charlo, José Carlos A1 Villar Castro, María del Pilar A1 Gheeraert, Etienne A1 Vo-Ha, A. A1 Soulière, Veronique A1 Rebaud, M A1 Carole, Davy A1 Ferro, Gabriel A2 Física Aplicada A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica K1 diamond K1 heteroepitaxy K1 SiC K1 TEM K1 VLS AB Vapor–liquid–solid (V–L–S) growth of SiC on (100) diamond substrate is reported. The crystalline quality is evaluated by transmission electron microscopy (TEM). Diffraction contrast (CTEM) observations allowed confirming the growth of fully lattice relaxed SiC 3C-type crystalline structure. Defects as dislocations at the diamond/SiC interface and stacking faults, in the thick SiC layer are revealed by high resolution TEM and CTEM. From the invisibility criteria, using dark field observations, 〈110〉 type Burger vector are identified. SN 1862-6300 YR 2014 FD 2014 LK http://hdl.handle.net/10498/30538 UL http://hdl.handle.net/10498/30538 LA eng DS Repositorio Institucional de la Universidad de Cádiz RD 13-nov-2026