RT journal article T1 Analysis of electron beam damage of exfoliated MoS2 sheets and quantitative HAADF-STEM imaging A1 García, Alejandra A1 Raya, Andrés M. A1 Mariscal, Marcelo M. A1 Esparza, Rodrigo A1 Herrera Collado, Miriam A1 Molina Rubio, Sergio Ignacio A1 Scavello, Giovanni A1 Galindo Riaño, Pedro Luis A1 Jose-Yacaman, Miguel A1 Ponce, Arturo A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica A2 Ingeniería Informática K1 Low-voltage transmission electron microscopy K1 Aberration-corrected microscopy K1 Molybdenum disulfide K1 Radiation damage AB In this work we examined MoS2 sheets by aberration-corrected scanning transmission electron microscopy (STEM) at three different energies: 80, 120 and 200 kV. Structural damage of the MoS2 sheets has been controlled at 80 kV according a theoretical calculation based on the inelastic scattering of the electrons involved in the interaction electron–matter. The threshold energy for the MoS2 material has been found and experimentally verified in the microscope. At energies higher than the energy threshold we show surface and edge defects produced by the electron beam irradiation. Quantitative analysis at atomic level in the images obtained at 80 kV has been performed using the experimental images and via STEM simulations using SICSTEM software to determine the exact number of MoS2 layers. PB Elsevier SN 1879-2723 YR 2014 FD 2014-06-02 LK http://hdl.handle.net/10498/33467 UL http://hdl.handle.net/10498/33467 LA eng DS Repositorio Institucional de la Universidad de Cádiz RD 11-nov-2026