RT journal article
T1 Comprehensive (S)TEM characterization of polycrystalline GaN/AlN layers grown on LTCC substrates
A1 Jiménez Ríos, Juan Jesús
A1 Manuel Delgado, José Manuel
A1 Bartsch, Heike
A1 Breiling, Jonnas
A1 García Roja, Rafael
A1 Jacobs, Heiko Otto
A1 Müller, Jens
A1 Pezodlt, Jörg
A1 Morales Sánchez, Francisco Miguel
A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A2 Física de la Materia Condensada
K1 Low temperature cofired ceramic
K1 Hybrid materials
K1 Aluminum nitride
K1 Electron microscopy
K1 Gallium nitride
AB Three GaN layers grown on polished AlN buffer films previously sputtered on Low-Temperature Co-fired Ceramic substrates have been studied by X-Ray Diffraction, Atomic Force Microscopy and Electron Microscopy related techniques. This allowed to assess the quality of the whole fabricated III-N/LTCC heterostructures considering factors such as superficial roughness, crystallinity, structural features (e.g.: lattice defects) and chemical homogeneity. All the AlN and GaN films were chemically uniform. However, for different regions and growth conditions, properties like the GaN average grain size or roughness varied significantly, and polycrystalline or partially single-crystalline GaN areas, with an elevated density of lattice defects, were identified. The particular surface structure of the LTCC substrate was regarded as key for the formation of these features, as it notably affected the AlN structure. Additional characteristics, like a different degree of c-axis orientation of the GaN grains or formation of small cubic GaN domains depending on the fabrication conditions, were also detected.
PB Elsevier
SN 0272-8842
YR 2019
FD 2019
LK http://hdl.handle.net/10498/34047
UL http://hdl.handle.net/10498/34047
LA eng
NO https://www.elsevier.com/about/policies-and-standards/copyright/permissions:"Under our sharing policy, Elsevier journal authors may post the preprint or accepted manuscript version of their article, but not the final published journal article, to their institutional repository. The article won’t be made public until after the embargo period.You may include a link to the article as it appears on Elsevier’s ScienceDirect website via the DOI.For more information on the various ways in which Elsevier journal authors may share their research, please visit our Sharing policy page."
NO No aplica
DS Repositorio Institucional de la Universidad de Cádiz
RD 10-nov-2026