RT journal article
T1 Systematic approach for high piezoelectric AlN deposition
A1 Nieto Sierra, Lucía
A1 Lloret Vieira, Fernando Manuel
A1 Gallardo Bernal, Juan Jesús
A1 García Núñez, Carlos
A1 Pelayo García, Manuel
A1 Alba Muñoz, Gonzalo
A1 Gibson, Des
A1 Araújo Gay, Daniel
A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A2 Física Aplicada
A2 Química Física
K1 Crystal structure; Microstructure; Piezoelectricity; Transmission electron microscopy; Vapor deposition
K1 Crystal structure
K1 Microstructure
K1 Piezoelectricity
K1 Transmission electron microscopy
K1 Vapor deposition
AB Aluminum nitride (AlN) is a wide band gap semiconductor with interesting piezoelectric properties for many applications, including micromechanical systems (MEMS), acoustic wave sensors or energy harvesting devices. The influence of DC reactive magnetron sputtering (DCRMS) deposition parameters on the structural, crystalline, and piezoelectric properties of AlN thin films are presented. The systematic approach of Design of Experiments (DoE) has been used to evaluate the role of magnetron power, nitrogen and argon flows on the deposition process and the film properties. Magnetron power and argon flow have resulted to be the parameters causing the most significant effects on the deposition rate. AlN films have been deposited with a high crystal quality, showing low values of FWHM (0.28) and c-axis orientation parallel oriented respect to the growth direction, as evidenced by X-ray diffraction (XRD) analysis and high-resolution transmission electron microscopy (HRTEM). These samples also showed a high piezoelectric coefficient (d33) of 5 pC/N for AlN thin films. This work highlights the importance of deposition parameters on the properties of the film and the important role that DoE play for its optimization with a minimum number of depositions.
PB Elsevier
SN 0925-8388
YR 2024
FD 2024
LK http://hdl.handle.net/10498/35812
UL http://hdl.handle.net/10498/35812
LA eng
DS Repositorio Institucional de la Universidad de Cádiz
RD 10-nov-2026