RT journal article
T1 On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition
A1 McKinlay, Michael
A1 Fleming, Lewis
A1 Pelayo García, Manuel
A1 Nieto Sierra, Lucía
A1 Villar Castro, María del Pilar
A1 Araújo Gay, Daniel
A1 García, Basilio Javier
A1 Gibson, Des
A1 García Núñez, Carlos
A2 Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
K1 optoelectronics
K1 piezoelectrics
K1 plasma physics
K1 plasma-assisted magnetron sputtering, PVD
K1 thin film deposition
K1 zinc oxide
AB This work presents a study of piezoelectric zinc oxide (ZnO) thin films deposited by a novel post-reactive sputtering method. The process utilizes a rotating drum with DC magnetron sputtering deposition onto substrates with subsequent DC plasma-assisted oxidation of the deposited metal to metal oxide. The paper analyzes the influence of plasmaassisted magnetron sputtering (PA-MS) deposition parameters (O2 plasma source power, O2 flow, and Ar flow) on the morphological, structural, optical, and piezoelectric properties of ZnO thin films. Design of experiments has been utilized to evaluate the role of these parameters on the growth rate (rg) and the properties of resulting films. Results indicate a predominant influence of the plasma power on the rg over other parameters. Among the eight tested samples, three of them show high crystal quality with high intensity (0001) diffraction peak, characteristic of the wurtzite crystalline structure of ZnO, and one of them exhibits piezoelectric coefficient values of ≈11pC N−1. That sample corresponding to a ZnO film deposited at the lowest rg of 0.075 nm s−1, confirmed the key role of the deposition parameters on the piezoelectric response of films, and demonstrated PA-MS as a promising technique to produce high-quality piezoelectric thin films.
PB John Wiley and Sons Inc.
SN 2196-7350
YR 2024
FD 2024
LK http://hdl.handle.net/10498/36145
UL http://hdl.handle.net/10498/36145
LA eng
DS Repositorio Institucional de la Universidad de Cádiz
RD 11-nov-2026