TY  - THES 
A3  - Araújo Gay, Daniel
A3  - Molina Rubio, Sergio Ignacio
AU  - Morales Sánchez, Francisco Miguel
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
PY  - 2003
UR  - http://hdl.handle.net/10498/14699
AB  - Mechanisms of formation involved in both thin films and crystalline precipitates of silicon carbide (SiC) are studied in this Ph. D. thesis. SiC is fabricated starting from single-crystalline silicon (Si) substrates by carbonization or by ion...
LA  - spa
KW  - engineering, materials Science
KW  - physics, condensed matter
KW  - engineering, electronics and electrical
KW  - ciencias de los materiales
KW  - materia condesada
KW  - electrónica
TI  - Desarrollo de sustratos de carburo de silicio mediante  carburización e implantación iónica de silicio monocristalino
M3  - info:eu-repo/semantics/doctoralThesis
ER  -