TY - CHAP AU - Alegre Salguero, María de la Paz AU - Bustarret, Etienne AU - Ben Fernández, Teresa AU - Villar, Maria del Pilar AU - Araújo Gay, Daniel A4 - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica PY - 2009 UR - http://hdl.handle.net/10498/17165 AB - Homoepitaxial diamond structure observation by transmission electron microscopy (TEM) is still a very hard job due to the difficulty in preparing electron transparent samples for the further observation. The present contribution details the... LA - eng KW - Homoepitaxial diamond KW - electrons microscopy KW - FIB-dual beam TI - TEM study of homoepitaxial diamond layers scheduled for high power devices: FIB method of sample preparation ER -