TY  - GEN 
AU  - Bohórquez, Carolina
AU  - Bakkali, Hicham
AU  - Delgado Jaén, Juan José
AU  - Blanco Ollero, Eduardo
AU  - Herrera, Manuel
AU  - Domínguez de la Vega, Manuel
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A4  - Física de la Materia Condensada
PY  - 2022
UR  - http://hdl.handle.net/10498/27028
AB  - This work reports the ellipsometry analysis of atomic layer deposition (ALD) films of ZnO doped with Zr to determine parameters like free carrier concentration and mobility. Thin films of zinc oxide (ZnO) and Zr-doped ZnO of thickness similar to 100...
LA  - eng
PB  - AMER CHEMICAL SOC
KW  - Zr-doped ZnO
KW  - ALD
KW  - spectroscopic ellipsometry
KW  - optical properties
KW  - free carrier density
KW  - Drude−TL model
TI  - Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
DO  - 10.1021/acsaelm.1c01026
ER  -