TY  - GEN 
AU  - Lacroix, Bertrand
AU  - Paumier, F.
AU  - Santos Izquierdo-Bueno, Antonio Jesús
AU  - Maudet, F.
AU  - Girardeau, T.
AU  - Dupeyrat, C.
AU  - García Roja, Rafael
AU  - Morales Sánchez, Francisco Miguel
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
PY  - 2022
SN  - 0169-4332
UR  - http://hdl.handle.net/10498/27556
AB  - Texture of crystalline In2O3:Sn (ITO) thin films prepared by combining ion beam sputtering (IBS) at room temperature and oblique angle deposition (OAD) has been studied depending on the vapor incidence on Si substrates (alpha, ranging from 50 degrees...
LA  - eng
PB  - ELSEVIER
KW  - Indium tin oxide
KW  - Ion beam sputtering
KW  - Oblique angle deposition
KW  - Thin films
KW  - Texture
KW  - Morphology
TI  - Texture in ITO films deposited at oblique incidence by ion beam sputtering
DO  - 10.1016/j.apsusc.2022.154677
ER  -