TY - GEN AU - Lloret Vieira, Fernando Manuel AU - Soto Portillo, Beatriz AU - Gutiérrez Peinado, Marina AU - Haenen, Ken AU - Araújo Gay, Daniel A4 - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica A4 - Física Aplicada PY - 2023 SN - 0925-9635 UR - http://hdl.handle.net/10498/28025 AB - Diamond n-type layers are crucial for the development of a new bipolar diamond-based electronic technology. However, the difficulties to incorporate impurity atoms into the diamond lattice make its growth a stage of technological research still in... LA - eng PB - ELSEVIER KW - P-doped KW - Diamond KW - TEM KW - MW PE CVD KW - N-type diamond KW - Defects TI - High phosphorous incorporation in (100)-oriented MP CVD diamond growth DO - 10.1016/j.diamond.2023.109746 ER -