TY  - GEN 
AU  - Key, M.J.
AU  - Llobera, A.
AU  - Lozano, M.
AU  - Ramos Lerate, Inmaculada Concepción
AU  - Seidemann, V.
A4  - Física Aplicada
PY  - 2004
SN  - 0168-9002
UR  - http://hdl.handle.net/10498/30128
AB  - Recent advances in the field ofmicroelectromechanical systems (MEMS) research can be applied to the fabrication of gaseous electron-multiplying microstructures for use in imaging radiation sensors, and show interesting possibilities in addressing...
LA  - eng
PB  - ELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS
KW  - Gas micropattern detectors
KW  - MEMS
KW  - SU8
KW  - MSGC
KW  - Microwell
TI  - Fabrication of gas amplification microstructures with SU8 photosensitive epoxy
DO  - 10.1016/j.nima.2004.03.023
ER  -