TY  - GEN 
AU  - Lloret Vieira, Fernando Manuel
AU  - Fiori, Alexandre
AU  - Araújo Gay, Daniel
AU  - Eon, David
AU  - Villar Castro, María del Pilar
AU  - Bustarret, Etienne
A4  - Física Aplicada
PY  - 2016
SN  - 0003-6951
UR  - http://hdl.handle.net/10498/30524
AB  - The selective doped overgrowth of 3D mesa patterns and trenches has become an essential fabrication step of advanced monolithic diamond-based power devices. The methodology here proposed combines the overgrowth of plasma-etched cylindrical mesa...
LA  - eng
TI  - Stratigraphy of a diamond epitaxial three-dimensional overgrowth using doping superlattices
DO  - 10.1063/1.4948373
ER  -