TY  - GEN 
AU  - Rouzbahani, Rozita
AU  - Nicley, Shanon S
AU  - Vanpoucke, Danny E P
AU  - Lloret Vieira, Fernando Manuel
AU  - Pobedinskas, Paulius
AU  - Araújo Gay, Daniel
AU  - Haenen, Ken
A4  - Física Aplicada
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
PY  - 2021
SN  - 0008-6223
UR  - http://hdl.handle.net/10498/30526
AB  - The methane concentration dependence of the plasma gas phase on surface morphology and boron incorporation in single crystal, boron-doped diamond deposition is experimentally and computationally investigated. Starting at 1%, an increase of the methane...
LA  - eng
KW  - Impurity incorporation
KW  - Methane concentration dependence
KW  - DFT calculation
KW  - CVD growth
KW  - Boron-doped single crystal diamond
TI  - Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
DO  - 10.1016/J.CARBON.2020.10.061
ER  -