TY  - GEN 
AU  - Mary Joy, Rani
AU  - Pobedinskas, Paulius
AU  - Baule, N
AU  - Bai, S
AU  - Jannis, D
AU  - Gaquelin, N
AU  - Pinault-Thaury, Marie-Amandine
AU  - Jomard, F
AU  - Jothiramalingam Sankaran, Kamatchi
AU  - Rouzbahani, Rozita
AU  - Lloret Vieira, Fernando Manuel
AU  - Desta, Derese
AU  - D´haen, J
AU  - Verbeeck, J
AU  - Becker, MF
AU  - Haenen, Ken
A4  - Física Aplicada
PY  - 2024
SN  - 1359-6454
UR  - http://hdl.handle.net/10498/30528
AB  - This study reports the impact of film microstructure and composition on the Young's modulus and residual stress in nanocrystalline diamond (NCD) thin films (≈250nm thick) grown on silicon substrates using a linear antenna microwave plasma-enhanced...
LA  - eng
KW  - Linear antenna
KW  - CVD reactor
KW  - Nanocrystalline diamond
KW  - Young’s modulus
KW  - Residual stress
TI  - The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films
DO  - 10.1016/J.ACTAMAT.2023.119548
ER  -