TY  - GEN 
AU  - Lloret Vieira, Fernando Manuel
AU  - Araújo Gay, Daniel
AU  - Villar Castro, María del Pilar
AU  - Rodriguez Madrid, Juan Gabriel
AU  - Iriarte, Gonzalo F
AU  - Williams, Oliver Aneurin
AU  - Calle, Fernando
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A4  - Física Aplicada
PY  - 2013
SN  - 0167-9317
UR  - http://hdl.handle.net/10498/30537
AB  - Due to its mechanical properties, diamond is very attractive as an active material for the fabrication of SAW resonators for high frequency applications. In this work, the synthesis of piezoelectric AlN films by reactive sputtering at room temperature...
LA  - eng
KW  - SAW filter
KW  - Diamond
KW  - AlN piezoelectric
KW  - TEM
KW  - NCD
KW  - High frequency resonator
TI  - Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM
DO  - 10.1016/j.mee.2013.04.007
ER  -