TY  - GEN 
AU  - Iriarte, Gonzalo F
AU  - Fernández de los Reyes, Daniel
AU  - González Robledo, David
AU  - Rodriguez, J.G.
AU  - García Roja, Rafael
AU  - Calle, F.
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
PY  - 2011
SN  - 01694332
UR  - http://hdl.handle.net/10498/30866
AB  - A pulsed DC reactive ion beam sputtering system has been used to synthesize aluminium nitride (AlN) thin films at room temperature by reactive sputtering. After systematic study of the processing variables, high-quality polycrystalline films with...
LA  - eng
PB  - Elsevier
KW  - AlN
KW  - Reactive sputtering
KW  - Surface science
KW  - Thin films
TI  - Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering
DO  - 10.1016/j.apsusc.2011.05.025
ER  -