TY  - GEN 
AU  - Valendolf Nunes, Jackeline
AU  - Piñero Charlo, José Carlos
AU  - Lloret Vieira, Fernando Manuel
AU  - Alba Muñoz, Gonzalo
AU  - Eon, D.
AU  - Araújo Gay, Daniel
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A4  - Didáctica
A4  - Física Aplicada
PY  - 2024
SN  - 1361-6528
SN  - 0957-4484
UR  - http://hdl.handle.net/10498/35697
AB  - Due to its capacity to achieve nanometre-scale machining and lithography, a focused ion beam (FIB) is an extended tool for semiconductor device fabrication and development, in particular, for diamond-based devices. However, some technological steps...
LA  - eng
PB  - IOP Publishing Ltd
KW  - cathodoluminescence
KW  - damage
KW  - FIB
KW  - optical properties
KW  - STEM technique
TI  - Spectral and microstructural analysis of the effect of the Ga+ implantation on diamond: a CL-EELS study
DO  - 10.1088/1361-6528/ad6327
ER  -