TY  - GEN 
AU  - Nieto Sierra, Lucía
AU  - Lloret Vieira, Fernando Manuel
AU  - Gallardo Bernal, Juan Jesús
AU  - García Núñez, Carlos
AU  - Pelayo García, Manuel
AU  - Alba Muñoz, Gonzalo
AU  - Gibson, Des
AU  - Araújo Gay, Daniel
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
A4  - Física Aplicada
A4  - Química Física
PY  - 2024
SN  - 0925-8388
UR  - http://hdl.handle.net/10498/35812
AB  - Aluminum nitride (AlN) is a wide band gap semiconductor with interesting piezoelectric properties for many applications, including micromechanical systems (MEMS), acoustic wave sensors or energy harvesting devices. The influence of DC reactive...
LA  - eng
PB  - Elsevier
KW  - Crystal structure; Microstructure; Piezoelectricity; Transmission electron microscopy; Vapor deposition
KW  - Crystal structure
KW  - Microstructure
KW  - Piezoelectricity
KW  - Transmission electron microscopy
KW  - Vapor deposition
TI  - Systematic approach for high piezoelectric AlN deposition
DO  - 10.1016/j.jallcom.2024.176723
ER  -