TY  - GEN 
AU  - McKinlay, Michael
AU  - Fleming, Lewis
AU  - Pelayo García, Manuel
AU  - Nieto Sierra, Lucía
AU  - Villar Castro, María del Pilar
AU  - Araújo Gay, Daniel
AU  - García, Basilio Javier
AU  - Gibson, Des
AU  - García Núñez, Carlos
A4  - Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica
PY  - 2024
SN  - 2196-7350
UR  - http://hdl.handle.net/10498/36145
AB  - This work presents a study of piezoelectric zinc oxide (ZnO) thin films deposited by a novel post-reactive sputtering method. The process utilizes a rotating drum with DC magnetron sputtering deposition onto substrates with subsequent DC...
LA  - eng
PB  - John Wiley and Sons Inc.
KW  - optoelectronics
KW  - piezoelectrics
KW  - plasma physics
KW  - plasma-assisted magnetron sputtering, PVD
KW  - thin film deposition
KW  - zinc oxide
TI  - On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition
DO  - 10.1002/admi.202400252
ER  -